Design of Industrial Vibration Transmitter Using MEMS Accelerometer

Industrial Acceleration Sensing Transmitter Using Capacitive MEMS Accelerometer

This paper presents the overall design of an industrial vibration transmitter using Micro Electro Mechanical System (MEMS) capacitive accelerometer. It describes the accelerometer sensor interfacing circuit, rms-to-dc converter and voltage to current loop converter circuit design, calibration procedure and mounting methods. The industrial vibration transmitter output can be customized to obtain...

Design Optimization of MEMS Comb Accelerometer

MEMS (Microelectromechanical Systems) refers to the technology integrating electrical and mechanical components with feature size of 1~1000 microns. MEMS comb accelerometers have been successfully applied for air-bag deployment systems in automobiles. In this paper, the design optimization of a polysilicon surface-micromachined MEMS comb accelerometer is discussed. The device uses folded-beam s...

A New Design and Optimization of Capacitive MEMS Accelerometer

In this paper, design and optimization of a folded beam for a shunt capacitive MEMS accelerometer is presented together with a comparison of important parameters to five beams with different geometries in range of 20g -100g for crash detection. The structure contains a proof mass which is suspended over fixed rigid pull-down electrode to provide capacitance measurement. Powerful soft wares (COV...

Design and Simulation of A CMOS-MEMS Accelerometer

Design Optimization of Capacitive MEMS Accelerometer for Improved Sensitivity

In this paper design of a two-axis capacitive accelerometer is described. Variation of capacitance of the device with applied acceleration as well as sensitivity of the device is analyzed. The performance analysis of the device is done using ANSYS Multyphysics software. From the analysis results, a capacitive mems accelerometer with enhanced sensitivity has been proposed. The sensitivity of the...